@conferenceObjectPart{SilvaNastaushevBasmajiRossiAegerter_1994,
title={Geração de máscaras em escala nano e micrométrica por litografia eletrônica},
author={Silva, Marcelo A. P. and Nastaushev, Y. and Basmaji, P. and Rossi, J. C. and Aegerter, Michel A.},
doi={http://dx.doi.org/10.22028/D291-24173},
subtitle={Mask generation of nano and micrometric scale by electron litography},
year={1994}
}