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doi:10.22028/D291-40383
Titel: | Target Design in SEM-Based Nano-CT and Its Influence on X-ray Imaging |
VerfasserIn: | Fell, Jonas Wetzler, Felix Maisl, Michael Herrmann, Hans-Georg |
Sprache: | Englisch |
Titel: | Journal of Imaging |
Bandnummer: | 9 |
Heft: | 8 |
Verlag/Plattform: | MDPI |
Erscheinungsjahr: | 2023 |
Freie Schlagwörter: | SEM-based CT X-ray target X-ray source image quality nano-CT spatial resolution |
DDC-Sachgruppe: | 500 Naturwissenschaften |
Dokumenttyp: | Journalartikel / Zeitschriftenartikel |
Abstract: | Nano-computed tomography (nano-CT) based on scanning electron microscopy (SEM) is utilized for multimodal material characterization in one instrument. Since SEM-based CT uses geometrical magnification, X-ray targets can be adapted without any further changes to the system. This allows for designing targets with varying geometry and chemical composition to influence the X-ray focal spot, intensity and energy distribution with the aim to enhance the image quality. In this paper, three different target geometries with a varying volume are presented: bulk, foil and needle target. Based on the analyzed electron beam properties and X-ray beam path, the influence of the different target designs on X-ray imaging is investigated. With the obtained information, three targets for different applications are recommended. A platinum (Pt) bulk target tilted by 25◦ as an optimal combination of high photon flux and spatial resolution is used for fast CT scans and the investigation of high-absorbing or large sample volumes. To image low-absorbing materials, e.g., polymers or organic materials, a target material with a characteristic line energy right above the detector energy threshold is recommended. In the case of the observed system, we used a 30◦ tilted chromium (Cr) target, leading to a higher image contrast. To reach a maximum spatial resolution of about 100 nm, we recommend a tungsten (W) needle target with a tip diameter of about 100 nm. |
DOI der Erstveröffentlichung: | 10.3390/jimaging9080157 |
URL der Erstveröffentlichung: | https://doi.org/10.3390/jimaging9080157 |
Link zu diesem Datensatz: | urn:nbn:de:bsz:291--ds-403833 hdl:20.500.11880/36305 http://dx.doi.org/10.22028/D291-40383 |
ISSN: | 2313-433X |
Datum des Eintrags: | 28-Aug-2023 |
Fakultät: | NT - Naturwissenschaftlich- Technische Fakultät |
Fachrichtung: | NT - Materialwissenschaft und Werkstofftechnik |
Professur: | NT - Prof. Dr. Hans-Georg Herrmann |
Sammlung: | SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Dateien zu diesem Datensatz:
Datei | Beschreibung | Größe | Format | |
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jimaging-09-00157-v2.pdf | 4,03 MB | Adobe PDF | Öffnen/Anzeigen |
Diese Ressource wurde unter folgender Copyright-Bestimmung veröffentlicht: Lizenz von Creative Commons